High Speed・Simple Operation・Safety
Reduce a waiting stress of SMIF Pod operation by High-speed Open/Close motion with safety feature are enhanced.
Features of 200mm SMIF Pod Opener
- Simple operation, Quick Open/Close
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- Start operation by each OPEN or CLOSE button press once, It enables high-speed open or close motion with reduced entrainment of particles.
Open time:Less than 10sec. (Special 7sec.)
Close time:Less than 11sec. (Special 8sec.)
- Start operation by each OPEN or CLOSE button press once, It enables high-speed open or close motion with reduced entrainment of particles.
- Excellent standard safety function
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- Wafer protrusion sensor
- Over access sensor
- Z-axis area sensor
(protect finger insert during Open motion active; Option) - Exhaust fan monitor sensor
- EMO button (Emergency Motion Off)
- MCB(5A,30mA) and Circuit protector (1.5A)
Prevent accidents during the operation in many safety feature.
- Simple indication LEDs
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- Ready LED
φ10mm Clear understanding - POD in Place φ8mm
- ERROR φ8mm
- Ready LED
- Keep clean environment
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- Efficient exhaust is good located bottom fan
(Option; Rear Fan, Exhaust duct and Table)
- Efficient exhaust is good located bottom fan
- Compact and Light weight
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- W=350mm, D=450mm, H=635mm
- Rear Z-axis cover W=245.6mm
- Weight Approx 20kg
- Lineup (Plan)
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- On table type
- (Indexer type)
- (Loader with Arm type)
- (Stand Alone type)
